The SLQ-QT105 is manufactured by Sensirion, and is a semicon grade-sensor solution for flow rates below 120 ml/min of hydrocarbon based liquids like photo-resists and solvents. It has short response time that permits the accurate monitoring of highly dynamic processes such as fast dosing operations. The unit is suitable for 4×3 mm PFA tubing, and can work without any moving parts measuring non-invasive through the wall of a straight flow path. It has RS485 digital interface that is provided for long distance and bus capability. It has maximum working pressure of 3 bar, and is available in high pressure ratings that is on request.